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重掺锑硅单晶制备中锑的蒸发速率常数的测定常青，曾世铭，何林，王君毅（北京有色金属研究总院１０００８８）关键词：硅单晶，锑，掺杂，蒸发速率，测定（一）实验重掺锑硅单晶是在ＣＧ－３０００型直拉单晶炉上研制的，直径为８２ｍｍ，晶向（１１１）。石英坩埚直径为...
Determination of Antimony Evaporation Rate Constant in Preparation of Antimony - doped Silicon Single Crystal CHANG Qing, ZENG Shiming, HE Lin, WANG Junyi (Beijing Institute of Nonferrous Metal Research, Beijing 100088, China) Keywords: single crystal silicon, antimony, doping, evaporation rate, A) Experiments The heavily doped antimony silicon single crystal was developed on a CG-3000 Czochralski single crystal furnace with a diameter of 82 mm and a crystal orientation of (111). Quartz crucible diameter is ...