论文部分内容阅读
以氢气和正硅酸乙酯为反应源,采用前驱体裂解的方法在硬质合金基体上制备非晶SiO2(a-Si O2)薄膜。X射线衍射(XRD)分析表明,非晶薄膜与基体发生反应,并在界面上形成硅钴化合物。此外,透射电镜(TEM)表征表明,该薄膜由微米级的空心球团状的非晶SiO2颗粒构成。随后,将非晶SiO2薄膜作为过渡层,采用热丝化学气相沉积技术在过渡层上沉积金刚石涂层。通过压痕试验表征制备获得的金刚石-非晶SiO2复合涂层对硬质合金基体的附着力。通过加工玻璃丝纤维增强塑料(GFRP)表征该复合涂层的切削性能。结果表明,非晶SiO2过渡层可以有效地改善金刚石涂层对硬质合金基体的附着力。此外,非晶SiO2过渡层的厚度对金刚石涂层附着力的提升效果有很大影响。
Amorphous SiO2 (a-Si O2) thin films were prepared on cemented carbide substrates by hydrogenation and tetraethyl orthosilicate (REE). X-ray diffraction (XRD) analysis shows that the amorphous film reacts with the matrix and forms a silicon-cobalt compound at the interface. In addition, transmission electron microscopy (TEM) characterization showed that the film consisted of micron-sized hollow pellet-shaped amorphous SiO2 particles. Subsequently, an amorphous SiO2 thin film was used as a transition layer, and a diamond coating was deposited on the transition layer using hot filament chemical vapor deposition. The adhesion of the prepared diamond-amorphous SiO2 composite coating to the cemented carbide substrate was characterized by indentation test. The machinability of the composite coating was characterized by processing glass fiber reinforced plastic (GFRP). The results show that the amorphous silicon transition layer can effectively improve the adhesion of the diamond coating to the cemented carbide substrate. In addition, the thickness of the amorphous SiO2 transition layer greatly affects the adhesion of the diamond coating.