本文描述了四类使 XPS 可选择面积小于1mm~2 的基本方法。在这四类中每一类还往往包含几种方法。对每一种都做了简单的介绍,并给出了某些方面的信息理论。某些方法直接适用于微区分析,而另外一些则需依靠样品的移动。文中对 SAXPS 的优缺点与其它微分析一扫描俄歇微分析和离子微束二次离子质谱做了比较,以表的形式列出来。 This article describes four basic methods for making XPS selectable areas less than 1mm2. Each of these four categories often contains several methods. A brief introduction is given to each of them, and some aspects of information theory are given. Some methods work directly with microarray analysis, while others rely on sample movement. In this paper, the advantages and disadvantages of SAXPS and other micro-analysis of a scanning Auger micro analysis and ion micro-beam secondary ion mass spectrometry were compared in the form of tabular list.