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超精密加工是60年代发展起来的机械制造新工艺。它不同于一般的高精度加工,已从一般的精密加工中分离出来,成为一种专门的加工类型,它是机械加工技术的一个重要发展方向。超精密加工技术是一门新兴的综合性工程科学。它利用近代的各种先进科学技术成就在十几年内,使机械加工精度提高了1～2个数量级。今天,超精密加工已达到0.1～0.01微
Ultra-precision machining is developed in the 60’s machinery manufacturing new technology. It is different from the general high-precision machining, has been separated from the general precision machining, a specialized processing type, it is an important development direction of machining technology. Ultra-precision machining technology is a new comprehensive engineering science. It makes use of modern advanced science and technology achievements in a dozen years, so that machining accuracy increased by 1 to 2 orders of magnitude. Today, ultra-precision machining has reached 0.1 ~ 0.01 micro