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采用溶胶-凝胶法以钨粉过氧化聚钨酸的有机溶液为先驱物制备出了WO3薄膜,研究了添加无水乙醇、冰乙酸对其成膜性能的影响,并进行了厚度、可见光谱、电化学循环伏安、X-射线测试。结果表明该法能制得质量好的WO3非晶态薄膜。
The WO3 thin films were prepared by sol-gel method using tungsten powder as the precursor. The effects of adding ethanol and glacial acetic acid on the film formation properties were investigated. The effects of thickness, visible spectrum , Electrochemical cyclic voltammetry, X-ray testing. The results show that the method can produce good quality WO3 amorphous film.