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在耐热钢真空炉中,通氮气加热制备TaN粉。以钽粉为原料,研究了恒温温度、恒温时间和氮气分压对TaN产品含N量的影响,确定了制备TaN粉的最佳工艺条件是:恒温温度为1100℃,氮气分压0.05MPa,恒温时间4h。可以制得含7.2%N、粒径小于1.0μm的超细TaN粉末。XRD分析表明,所得的TaN产品以TaN为主,含有少量的Ta2N,TaN0.8。
In a heat-resistant steel vacuum furnace, nitrogen is heated to prepare TaN powder. The effects of constant temperature, constant temperature and partial pressure of nitrogen on the content of N in TaN were studied using tantalum powder as raw material. The optimum conditions for preparing TaN powder were determined as follows: constant temperature of 1100 ℃, nitrogen partial pressure of 0.05 MPa, Constant temperature time 4h. Ultrafine TaN powder containing 7.2% N and particle size less than 1.0 μm can be obtained. XRD analysis showed that the obtained TaN product mainly consists of TaN with a small amount of Ta2N and TaN0.8.