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对拉曼波谱测量金刚石薄膜内应力时存在的差异现象进行了分析。研究表明应力方向和晶体取向的未知，导致多晶金刚石薄膜中应力值与拉曼波谱位移量之间的比例系数难以准确选取，是造成计算出的内应力结果不一致的原因之一。
The phenomenon of difference in Raman spectroscopy measurement of diamond thin film internal stress was analyzed. Studies have shown that the stress direction and crystal orientation unknown, resulting in the ratio between the stress value and the displacement of the Raman spectrum polycrystalline diamond film is difficult to accurately select the proportionality coefficient, which is caused by one of the reasons for the calculated results of internal stress inconsistencies.