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提出了一种用时序驱动光敏元构成匀速扫描坐标系的方法,实现了将被测物体空间位移的测量转换为对时间差的测量。根据时栅相对运动双坐标系的转换原理,将线阵CCD的光敏元视为匀速扫描坐标系,两个空间上并排,时序上互相错开的线阵CCD为静止坐标系,则同一被测对象在两个CCD上输出电信号的时间差的变化量与扫描速度的乘积,即为所测位移的大小,并可以判断位移的方向。用雷尼绍激光干涉仪对所研制的CCD时栅传感器进行校准,在有效测量范围(600.05 mm)内,经过修正后的测量误差控制在±2μm以内,实现了在光学领域应用时间测量空间的思想。
A time-driven photosensitive element is proposed to form a uniform scanning coordinate system, and the measurement of spatial displacement of the measured object is converted into the measurement of the time difference. According to the conversion principle of the time-grating relative motion double-coordinate system, the linear CCD of the linear CCD is regarded as a uniform scanning coordinate system. Two linear CCDs, which are arranged side by side in time and staggered in time, are in a stationary coordinate system. The difference between the time difference of the output electrical signal and the scanning speed on the two CCDs is the magnitude of the measured displacement and the direction of the displacement can be judged. Using Renishaw laser interferometer to calibrate the CCD time-grating sensor, within the effective measurement range (600.05 mm), the corrected measurement error is controlled within ± 2μm, which realizes the application of time measurement space in the optical field thought.