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在光刻机硅片台高精度运动控制系统中,线缆对硅片台运动产生的扰动是一个主要的扰动源。这是由于线缆部件附加在硅片台上的扰动力和力偶导致了系统的耦合问题,恶化了系统运动控制的性能。该文通过对硅片台粗动台的力学建模,分析附加力偶的影响,引入广义质心偏移的数学描述,通过时变参数在线递推估计算法获得广义质心偏移的参数,该参数实时用于硅片台平面电机4组线圈水平推力的解耦。实验结果表明:使用该参数递推估计算法实现实时动态解耦,自适应能力强,降低了系统3自由度之间的串扰,提高了运动控制系统的性能。
In the high-precision motion control system of the lithography machine wafer stage, the disturbance caused by the cable to the wafer stage motion is a major disturbance source. This is due to the cable components attached to the wafer stage turbulence and force coupling problems caused by the system, deteriorating the performance of system motion control. In this paper, through the mechanical modeling of the coarse motion stage of the wafer table, the influence of the additional couple is analyzed, the mathematical description of the generalized center of mass shift is introduced, and the parameters of the generalized centroid offset are obtained by the on-line recursive estimation algorithm of the time-varying parameter. Used for the decoupling of horizontal thrust of 4 sets of coil of planar motor in wafer table. The experimental results show that the proposed algorithm can achieve real-time dynamic decoupling using the recursive estimation algorithm, and has strong adaptability, reducing crosstalk between the three degrees of freedom of the system and improving the performance of the motion control system.