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用溶胶-凝胶法制成了NiO掺杂的ZnFe2O4溶胶,并用浸渍提拉法将其固定在锡掺杂玻璃光波导表面,研制了NiO-ZnFe2O4复合薄膜/锡掺杂玻璃光波导气敏元件,并对无机有毒气体进行了检测。实验结果表明,在室温下,该传感元件对H2S气体具有一定的选择性响应,而对相同浓度的其它无机气体的响应相对较小,能够检测到1.0×10-9(体积比)的H2S气体,其响应和恢复时间分别是6和8 s。该元件具有灵敏度高、响应-恢复快、可逆性和重复性好、容易制备,在室温下便于操作等特点。
NiO doped ZnFe2O4 sol was prepared by sol-gel method and fixed on the surface of tin-doped glass optical waveguide by dip-pull method. NiO-ZnFe2O4 composite thin film / tin-doped glass optical waveguide gas sensor was developed. Inorganic toxic gases were also tested. The experimental results show that the sensing element has a selective response to H2S gas at room temperature and a relatively small response to other inorganic gases at the same concentration, which can detect 1.0 × 10 -9 H2S Gas, its response and recovery time are 6 and 8 s, respectively. The device has the characteristics of high sensitivity, fast response-recovery, good reversibility and repeatability, easy preparation and easy operation at room temperature.