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叉指换能在一定频率的电信号激励下,除沿基片表面激励声表面波外,还将向基片内部激励声体波。文章对叉指换能器在不同切型基片内激励声体波的角谱(能量分布)进行了研究,所得结果在研制声学传感器、声表面波器件时具有重要意义。
The interdigital transducer can excite acoustic wave to the inside of the substrate except for the excitation of the surface acoustic wave along the surface of the substrate under the excitation of the electric signal of a certain frequency. In this paper, the angular spectrum (energy distribution) of acousto-acoustic waves excited by interdigital transducers in different substrate types is studied. The results obtained are of great significance in the development of acoustic sensors and surface acoustic wave devices.