论文部分内容阅读
通过求解考虑初应力时的耦合波动方程,研究了覆盖层为各向同性材料、基底为横观各向同性压电材料的压电层状结构中广义Rayleigh 波传播时初应力和相速度的关系.结果表明,对于给定的材料参数和薄膜厚度,通过测量薄膜结构中的声表面波传播速度即可确定薄膜中的初应力,这对声表面波器件设计及薄膜结构的力学性能分析具有理论意义和实际应用价值.
The relationship between initial stress and phase velocity of generalized Rayleigh wave propagating in piezoelectric layered structure with transversely isotropic piezoelectric substrate is investigated by solving the coupled wave equation with initial stress. . The results show that for a given material parameter and film thickness, the initial stress in the film can be determined by measuring the propagation velocity of the SAW in the film structure, which is of theoretical significance for the SAW device design and the mechanical properties analysis of the film structure And practical value.