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(一)透射电子显微镜的发展概况电子显微镜(以下称电镜)创制至今,只有四十多年,但发展很快,1932年德国创制第一台电镜时,只能放大12倍。1939年虽已有商品电镜,但还处于实验室阶段,50年代中叶起,应用逐渐广泛,性能和结构不断改进,分辨率提高到10埃。到60年代中叶,电镜达到了完善程度,现在的分辨本领达到了理论极限1.4埃,自动化程度也不断提高。同时出现了扫描,超高压电镜等。 1958年,我国长春光技所试制了第一台国产电镜,分辨率为60埃。60年代初,上海光电所制造了20万倍电镜,1965年起批量生产了分辨率6.99埃的20万倍电镜。到1978年,又制造了80万倍、分辨率1.4埃电镜,达到了70年代国际水平。 (二)透射电子显微镜的结构
(A) the development of transmission electron microscopy Electron microscopy (hereinafter referred to as electron microscope) created so far, only forty years, but the rapid development of Germany in 1932 the creation of the first electron microscope, can only enlarge 12 times. 1939 Although there are commercial electron microscope, but still in the laboratory stage, since the mid-50s, the application is gradually wide range of performance and structure of continuous improvement, the resolution increased to 10 angstroms. By the mid-1960s, electron microscopy has reached a perfect level, and now the resolving power has reached the theoretical limit of 1.4 angstroms, and the degree of automation has been continuously improved. At the same time there was scanning, ultra-high voltage electron microscope. In 1958, China’s Changchun Institute of Optics produced the first domestic electron microscope with a resolution of 60 angstroms. In the early 1960s, Shanghai Photovoltaic Corporation made 200,000 times of electron microscopes and in 1965 produced 200,000 times of electron microscopes with a resolution of 6.99 angstroms. By 1978, another 800,000 times of electronic microscopes with a resolution of 1.4 angstroms were manufactured, reaching the international standards of the 1970s. (B) the structure of transmission electron microscopy