１９９４～１９９５年日本气体设备综述１空分装置１．１低温空分装置１９９４年制作的低温空分装置总计为２７台，比上一年增加３台，实际上无大型装置出现。大型装置主要用于在电子工业中生产Ｎ２。所制造的２７台装置中有１１台用于半导体工业，小型现场装置的数量正在... 1994-1995 Summary of Japan’s Gas Equipment 1 Air Separation Plant 1.1 Low Temperature Air Separation Unit In 1994, a total of 27 low temperature air separation units were produced, an increase of 3 units over the previous year. In fact, no large-scale installations were present. Large installations are mainly used to produce N2 in the electronics industry. Eleven of the 27 devices manufactured are used in the semiconductor industry and the number of small field devices is ...