Transparent anatase TiO2 nanometer thin films with photocatalytic activity were prepared via the sol-gel method on soda-lime glass. The thickness, crystalline phase, grain size, surface hydroxyl amount and so on were characterized by scanning electron microscopy (SEM), X-ray diffraction (XRD), transmission electron microscopy (TEM), X-ray photoelectron spectroscopy (XPS) and UV-visible spectrophotometer (UV-VIS). The photocatalytic activity of TiO2 thin films was evaluated for the photocatalytic decolorization of aqueous methyl orange. The effects of film thickness on the crystalline phase, grain size, transmittance and photocatalytic activity of nanometer TiO2 thin films were discussed.