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在激光雷达等领域,通常希望激光光束实现低转动惯量高频率匀速扫描,而目前光束扫描器(如检流计式振镜、多面转镜等)很难达到这种要求,为此设计了一种基于新型压电驱动器的激光扫描器。激光扫描器基于一对新型的位移放大压电驱动器,有限元分析结果表明这种压电驱动器具有比传统杠杆式位移放大压电驱动器更好的高频特性。采用软件补偿和串联硬件陷波器相结合的开环控制方法,补偿压电陶瓷迟滞效应影响和抑制机械谐振,提高了扫描线性度,实现了高频三角波扫描。该扫描器还具有转动惯量低、体积小,结构简单、功耗低等优点。
In the field of laser radar and the like, it is usually desired that the laser beam be scanned at a constant high frequency with a low moment of inertia. At present, beam scanners (such as a galvanometer galvanometer, a polygon mirror, etc.) hardly meet this requirement. For this reason, Laser scanner based on new piezo driver. The laser scanner is based on a new pair of displacement-amplifying piezo actuators. Finite element analysis results show that the piezo-actuators have better high-frequency characteristics than the traditional lever-type displacement amplifying piezo actuators. The open-loop control method combined with software compensation and series hardware notch filter can compensate the hysteresis effect of piezoelectric ceramic and suppress the mechanical resonance, improve the scanning linearity and realize the high-frequency triangular wave scanning. The scanner also has a low moment of inertia, small size, simple structure, low power consumption and other advantages.