1.前言最近,随着加工设备的高精度化,大功率二氧化碳激光器金属反射镜所用的铜、金等软质金属,已能用金刚石进行切削加工.据认为,用金刚石切削加工的金属反射镜,具有以下优点:(1)形状精度和表面光洁度好;(2)散射小;(3)表面反射率高;(4)激光光束引起镜面损伤的阈值高;(5)对环境的适应性强,和研磨、抛光加工镜面工艺相比,用金刚石切削还可以缩短加工时间. 1. Introduction Recently, with the high precision of processing equipment, soft metals such as copper, gold and other soft metals used in high-power carbon dioxide laser metal mirrors have been able to be machined with diamonds. It is considered that the use of diamond-cut metal mirrors , Has the following advantages: (1) good shape accuracy and surface finish; (2) small scattering; (3) high surface reflectivity; (4) high threshold of laser beam induced specular damage; , And grinding, polishing mirror process compared to using diamond cutting can also shorten the processing time.