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采用高温超导薄膜YBaCuO和GdBaCuO研制超导红外探测器。将超导膜通过光刻湿法腐蚀成形后,用剥离技术制备金电极并合金化,热压焊接4根引线,超导芯片安装在抽空窗口为KRS-5的红外探测器杜瓦瓶中。77K超导红外探测器的测试性能为:NEP_(min)=1.6×1~(-9)W/Hz~(1/2),D_(bbmax)~*=4.15×10~7cmHz~(1/2)/W,R_(max)(500K)=136V/W,τ_(min)=8.8ms,λ_p=13.6μm。对超导器件的稳定性考察得出:微桥寿命最短,长桥次之,蛇形较长。一支蛇形器件经过数十次的冷热循环和电测试,寿命已超过5个月。
Superconducting infrared detectors were fabricated using high temperature superconducting thin films YBaCuO and GdBaCuO. After the superconducting film was etched and formed by photolithography wet etching, the gold electrode was prepared by the stripping technology and alloyed. The four leads were heat-pressure welded, and the superconducting chip was installed in the infrared detector dewar bottle of the KRS-5 with the evacuation window. The test performance of the 77K superconducting infrared detector is as follows: NEP min = 1.6 × 1 -9 W / Hz 1/2 and D bbmax ~ * = 4.15 × 10 -7 cmHz ~ (1 / 2) / W, R max (500K) = 136V / W, τ_ (min) = 8.8 ms, and λ_p = 13.6 μm. Investigation of the stability of the superconducting device obtained: the shortest life span of the micro bridge, followed by the long bridge, serpentine longer. A serpentine device after dozens of thermal cycles and electrical tests, life expectancy has more than 5 months.