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目前的太赫兹功率探头主要采用热敏电阻和热电偶作为功率检测器件,测量速度较慢。肖特基二极管具有较快的检波速度,但是在太赫兹频段检波灵敏度降低,功率检测实现的难度很大,本文对基于肖特基二极管的太赫兹功率探头设计技术进行研究,采用双平衡检波、渐变波导匹配、小信号斩波放大、温度补偿等技术,实现了肖特基二极管在太赫兹频段的高灵敏度、高稳定性功率检测,试验结果表明:0.11THz~0.325THz频段端口驻波比优于1.35,灵敏度优于-40d Bm。
The current terahertz power probe thermistor and thermocouple used as the main power detection device, the measurement speed is slower. Schottky diode has a faster detection speed, but in the terahertz band detection sensitivity decreases, the power detection is difficult to achieve, this paper based on the Schottky diode terahertz power probe design technology research, the use of double-balanced detection, Tapered waveguide matching, small signal chopping amplification, temperature compensation and other technologies to achieve the Schottky diode in the terahertz band of high sensitivity, high stability power detection, the test results show that: 0.11THz ~ 0.325THz band port standing wave ratio excellent At 1.35, the sensitivity is better than -40d Bm.