比对法漏率校准装置是计量气体漏率的一种装置 ,可绝对法和相对法对真空漏孔进行校准。绝对法的校准范围为 10 - 4～ 10 - 9Pa· m3/s;相对合成标淮不确定度为小于 10 %。相对比对法的校准范围为 10 - 6～10 - 1 0 Pa· m3/s,相对合成标准不确定度为小于 2 5 %。 A comparison of leak rate calibration devices is a device for measuring gas leak rates that can be used to calibrate vacuum leaks by both absolute and relative methods. The calibration range of the absolute method is 10 - 4 ~ 10 - 9Pa · m3 / s; relative synthetic standard uncertainty is less than 10%. The calibration range of relative comparison method is 10 - 6 ~ 10 - 10 Pa · m 3 / s, and the relative synthetic standard uncertainty is less than 25%.