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通过对主膜系添加匹配层并借助计算机对膜系进行优化,设计出结构规整、性能优良的1064nm倍频波长分离膜。用电子束蒸发及光电极值监控技术在K9玻璃基底上沉积薄膜,将样品置于空气中在260℃温度下进行3h热退火处理。然后用Lambda900分光光度计测量了样品的光谱性能;用表面热透镜(STL)技术测量了样品的弱吸收值;用调Q脉冲激光装置测试了样品的抗激光损伤阈值(LIDT)。实验结果发现,样品的实验光谱性能与理论光谱性能有很好的一致性,退火前后其光谱性能几乎没有发生温漂,说明薄膜的温度稳定性好;同时退火使样品的弱吸收减小,从而其激光损伤阈值提高。理论和实验结果均表明,对主膜系添加匹配层的方法是1064nm倍频波长分离膜设计的较好方法。
By adding a matching layer to the main membrane system and optimizing the membrane system by computer, a regular structured and high performance 1064 nm frequency-doubling wavelength separation membrane is designed. Thin films were deposited on a K9 glass substrate by electron beam evaporation and photoemission monitoring. The samples were placed in air and thermally annealed at 260 ° C for 3 hours. The spectroscopic properties of the samples were measured with a Lambda900 spectrophotometer. The weak absorbance of the samples was measured by the surface thermal lens (STL) technique. The anti-laser damage threshold (LIDT) of the samples was measured by Q-switched laser. The experimental results show that the experimental spectral properties of the sample are in good agreement with the theoretical spectroscopic properties, and there is almost no temperature drift before and after annealing, indicating that the temperature stability of the film is good; meanwhile, the weak absorption of the sample is reduced by annealing The laser damage threshold is increased. The theoretical and experimental results show that the method of adding a matching layer to the main film is a better method for designing a 1064nm frequency doubling wavelength separation film.