六十年代初,人们开拓了一门崭新技术——微细加工技术。微细加工是以加工的分辨率达到微未级为其特征的。微细加工包罗了电工学、光学、磁学、热学等方面所需元器件的加工。当代超大规模集成电路的加工,代表了微细加工的水平。在一个不足几毫米见方的芯片上,居然布置了上百万个元器件,图形极为精细,线宽及间距均小于1微米。就是这个小小的芯片却具有前人难以想象的奇妙功能,它集中了当代各门尖端技术的精华。微细加工是一种特种加工技术,其中光束(包括光束、激光束、x光束)、分子束、电子束、离子束的束流加工技术占有重要席位。离子铣就属于离子束加工技术的范畴。所谓离子铣是利用一束离子来轰击被加工工件的 In the early sixties, people opened up a new technology - micro-processing technology. Micro-processing is to process the resolution of micro-level is not characterized. Micro-processing includes electrical engineering, optics, magnetism, thermal and other aspects of the necessary components of processing. The processing of today’s VLSIs represents the level of microfabrication. In less than a few millimeters square chip, actually arranged millions of components, the picture is very fine, line width and spacing are less than 1 micron. It is this tiny chip that has unbelievably marvelous features of its predecessors that focus on the essence of contemporary cutting-edge technology. Microfabrication is a special processing technology in which beams (including beams, laser beams, x-rays), beam-beam processing, electron beams, and ion beams occupy important positions. Ion milling belongs to the field of ion beam processing technology. The so-called ion milling is the use of a bunch of ions to bombard the workpiece being processed