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采用等离子体化学气相沉积(PCVD)法,在0.1~0.3 mm厚的普通硅钢片表面涂硅,再进行短时间高温扩散,使硅钢片的合Si量增加到6.5%,铁损P10/50比原来钢片降低50%,其他磁性能也大有改善。试验结果表明,在460~600℃涂硅,其他条件不变,涂硅速度随温度升高而降低,并对等离子体反应的动力学和热力学进行了研究。
Using plasma CVD (PCVD) method, silicon is coated on the surface of ordinary silicon steel with the thickness of 0.1-0.3 mm, and then diffused in high temperature for a short time to increase the amount of Si in the silicon steel sheet to 6.5% Iron loss P10 / 50 50% lower than the original steel, the other magnetic properties have greatly improved. The results show that the silicon coating at 460-600 ℃, the other conditions remain unchanged, the silicon coating speed decreases with increasing temperature, and the plasma reaction kinetics and thermodynamics were studied.