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提出了在各膜层之间插入虚膜的计算方法 ,导出了相应的光学薄膜传输矩阵 .该方法使得膜与膜之间解耦 ,并便于在计算机上存储和计算薄膜的反射率、透射率以及能流密度 .对抗蚀剂曝光的计算结果表明这种技术是有效的 .
The calculation method of inserting the virtual film between the layers is proposed and the corresponding optical film transfer matrix is deduced.The method makes decoupling between the film and the film and makes it easy to store and calculate the reflectivity, transmittance As well as the energy flux density.The calculation of resist exposure shows that this technique is effective.