日本三菱材料公司和日本硅公司开发了半导体用单晶硅连续直拉法(SCCZ法),日本硅公司新装一台连续直拉专用炉,经连续试验后定于1991年8月正式投入生产。三班工作月产量可达到1万片(5时硅片),建立了批量生产的正式供应体制。利用试验设备生产的4时硅片已于1990年秋季开始销 Japan’s Mitsubishi Materials Corporation and Japan’s silicon company developed a single-crystal silicon continuous straight-pull method (SCCZ France), Japan’s silicon company to install a special furnace for continuous straight-pull, after continuous testing scheduled for 1991 August formally put into production. Three shifts of work can reach 10,000 (5:00 silicon), the establishment of a formal production system of mass production. The 4 o’clock silicon produced by the test equipment was sold in the fall of 1990