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光刻机在集成电路的大规模生产中占有重要地位。掩模台的高速度高精度控制直接决定了芯片制造的线宽及生产效率。本文介绍了运动控制中常用的三环PID控制方法。此方法易于调试,控制精度高。分析了磁悬浮平台结构的摩擦阻力特性。通过实验测试及系统辨识得到控制系统传递函数模型后,进行仿真分析,确定了控制器参数。在控制系统中加入扰动信号进行仿真,证明系统在扰动存在下,控制可以达到预期纳米级精度。
Lithography in the large-scale production of integrated circuits occupy an important position. High speed and high precision control of the mask table directly determines the line width and the production efficiency of the chip manufacturing. This article describes the three-loop PID control method commonly used in motion control. This method is easy to debug, high control accuracy. The frictional resistance characteristics of the structure of the magnetic suspension platform are analyzed. Through the experimental test and system identification, the transfer function model of the control system is obtained, and the simulation analysis is carried out to determine the controller parameters. The disturbance signal is added into the control system to simulate, which proves that the system can achieve the expected nanoscale accuracy in the presence of disturbance.