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本文介绍一种用氦氖气体激光器作光源，以光干涉原理定位的自动分步重复照相 机。该机主要由激光干涉系统、精密机械系统、电子控制机和激光频率稳定器组成。由 于采用激光干涉定位系统直接测量工作台位移，保证重复定位精度高于±１微米。 文中着重介绍激光干涉系统结构设计特点及激光用于精密定位时的有关问题．同时 提供了主要技术参数和实验资料。对整机的精度分析和检定结果说明，产品实际精度可 达到±０，７５微米。此种分步相机现已用于工业生产。
This article describes an automatic step-and-repeat camera that uses a helium-neon gas laser as a light source and uses the principle of optical interference. The aircraft mainly by the laser interferometry systems, precision machinery systems, electronic control and laser frequency stabilizer composition. As the laser interferometer positioning system directly measure the displacement of the table to ensure that repeat positioning accuracy is higher than ± 1 micron. This article focuses on the structure design of laser interferometer system and the related problems when the laser is used for precise positioning. At the same time provide the main technical parameters and experimental data. The accuracy of the machine analysis and test results show that the actual product accuracy up to ± 0,75 microns. This step-by-step camera is now used in industrial production.