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介绍了高功率980 nm 脊型波导半导体激光器的设计及制造。为了减少腔面处的光功率密度，设计了宽波导结构。利用常规工艺获得了最大500 mW 输出的器件，同时灾变光学损伤阈值达到了560 mW。
980 nm高功率脊型波导半导体激光器
【摘 要】
：
介绍了高功率980 nm 脊型波导半导体激光器的设计及制造。为了减少腔面处的光功率密度，设计了宽波导结构。利用常规工艺获得了最大500 mW 输出的器件，同时灾变光学损伤阈值达到了560 mW。
【机 构】
：
司法文明协同创新中心,北京100088证据科学教育部重点实验室,中国政法大学,北京100088中国科学研究院半导体研究所，北京100083
【出 处】
：
激光与光电子学进展
【发表日期】
：
2015年52期
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