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本文介绍了一种高性能的二次离子分析系统。它是在四极质谱计的基础上用拒斥-加速型能量分析器和大口径通道式电子倍增器组成。通过离子轨迹的计算、离子光学系统的设计及一系列的实验研究,改善了系统中的匹配,提高了系统的性能。用热发射的Na~+源测试了系统的性能。最小能量通带(FWHM)可达0.4eV,已接近Na~+源本身的能量分散(0.3eV)。在质量分辨ΔM_(5%H)≤1amu及较宽的能量通带下,整个系统的最大流通率(检测到的离子数与入射到系统中的离子数之比)可达1—8%。实验结果表明,此系统既可用于高灵敏度的静态二次离子质谱分析,也可用于二次离子能谱的研究。
This article describes a high performance secondary ion analysis system. It is based on a quadrupole mass spectrometer with a rejection-accelerated energy analyzer and a large-aperture electron channel electron multiplier. Through the calculation of ion trajectory, the design of ion optical system and a series of experimental research, the matching in the system is improved and the performance of the system is improved. The performance of the system was tested with a heat-emitting Na ~ + source. The minimum energy passband (FWHM) of up to 0.4eV is close to that of the Na ~ + source itself (0.3eV). With a mass resolution of ΔM_ (5% H) ≤1 amu and a broad energy passband, the maximum system throughput (the ratio of the number of ions detected to the number of ions incident on the system) can be as high as 1 to 8%. Experimental results show that this system can be used for both high sensitivity static secondary ion mass spectrometry and secondary ion energy spectroscopy.