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利用有限元法计算分析了以阴极尖锥阵列体作为力敏感膜的形变特性,给出了用表达式计算尖锥阵列体形变的修正值,为后继工作提供了可以选择的技术途径。
The finite element method is used to calculate and analyze the deformation characteristics of the cathode cone array as the force sensitive membrane. The correction value of the deformation of the cone array with the expression is given, which provides an alternative technical approach for the subsequent work.