Fabrication of ordered micro- and nano-scale patterns based on optical discs and nanoimprint

来源 :Optoelectronics Letters | 被引量 : 0次 | 上传用户:isongnosi
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A simple method to fabricate one-dimensional(1-D) and two-dimensional(2-D) ordered micro- and nano-scale patterns is developed based on the original masters from optical discs, using nanoimprint technology and soft stamps. Polydimethylsiloxane(PDMS) was used to replicate the negative image of the 1-D grating pattern on the masters of CD-R, DVD-R and BD-R optical discs, respectively, and then the 1-D pattern on one of the PDMS stamps was transferred to a blank polycarbonate(PC) substrate by nanoimprint. The 2-D ordered patterns were fabricated by the second imprinting using another PDMS stamp. Different 2-D periodic patterns were obtained depending on the PDMS stamps and the angle between the two times of imprints. This method may provide a way for the fabrication of complex 2-D patterns using simple 1-D masters. A simple method to fabricate one-dimensional (1-D) and two-dimensional (2-D) ordered micro- and nano-scale patterns is developed based on the original masters from optical discs, using nanoimprint technology and soft stamps. Polydimethylsiloxane PDMS) was used to replicate the negative image of the 1-D grating pattern on the masters of CD-R, DVD-R and BD-R optical discs, respectively, and then the 1-D pattern on one of the PDMS stamps was The 2-D ordered patterns were fabricated by the second imprinting using another PDMS stamp. Different 2-D periodic patterns were obtained depending on the PDMS stamps and the angle between the two times of imprints. This method may provide a way for the fabrication of complex 2-D patterns using simple 1-D masters.
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