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采用直流电弧等离子体蒸发－凝聚法制备了高纯氮化铝（ＡＩＮ）纳米粉末。粉末的平均晶粒度为５０ｎｍ，纯度大于９８％。借助Ｘ射线光电子能谱、化学分析和差热失重等测试手段，探索了ＡＩＮ纳米粉末的表面化学组成和氧化特性。研究结果表明，ＡＩＮ纳米粉末易吸湿氧化，大大降低了其纯度。ＡＩＮ纳米粉末表面的氧是以两种状态即物理吸附态和化合态存在。
High purity aluminum nitride (AIN) nanopowder was prepared by DC arc plasma evaporation-coacervation. The average grain size of the powder is 50 nm and the purity is greater than 98%. By means of X-ray photoelectron spectroscopy, chemical analysis and differential thermal gravimetric analysis, the surface chemical composition and oxidation properties of AIN nanopowders were explored. The results show that AIN nanopowder is hygroscopic and oxidized, greatly reducing its purity. The oxygen on the surface of AIN nanopowders exists in two states, namely physically adsorbed and chemically bonded.