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扫描电镜主机安装了X射线分析装置后,它不但可以进行微观形貌观察,而且还能同时提供化学成份分析。操作迅速、使用方便的能量色散谱仪(EDS)占有大多数,但是波长色散谱仪(WDS)也有它的独道之处。DXS—X_2小型分析扫描电镜安装了倾斜WDS,如图1所示。它的X射线出射角为30°。可装四块晶体(LiF、PET、RAP、STE)。元素分析范围:5~B～92~u。聚焦圆半径为140mm,X射线强度和分Y本领都能得到兼顾。本仪器除了能进行定点作元素扫描分析外,还能进行面分析,线分析。由于倾斜WDS对试样表面起伏变化表现为迟钝。因此对不光滑试样表面,如断口等粗糙表面进行定性分析更有利。如图2所示。
With the X-ray analysis unit installed on the SEM, it can not only perform microscopic observation, but also provide chemical composition analysis. Fast, easy-to-use energy dispersive spectroscopy (EDS) holds the lion’s share, but wavelength dispersive spectroscopy (WDS) also has its own ways. The DXS-X_2 Minianalytical Scanning Electron Microscope has a tilted WDS mounted as shown in Figure 1. Its X-ray exit angle is 30 °. Can hold four crystals (LiF, PET, RAP, STE). Elemental analysis range: 5 ~ B ~ 92 ~ u. Focusing circle radius of 140mm, X-ray intensity and sub-Y skills can be taken into account. In addition to the instrument for fixed-point elemental scanning analysis, but also for surface analysis, line analysis. Due to tilt WDS on the sample surface fluctuation showed slow. Therefore, it is more advantageous to conduct qualitative analysis on the surface of a non-smooth sample, such as a rough surface such as a fracture. as shown in picture 2.