论文部分内容阅读
综述了脉冲沉积(PLD)类金刚石膜(DLC)的优势和局限,对其局限的补偿和突破,以及脉冲沉积法的重要发展方向——超快脉冲激光沉积(Ultra-fast PLD)类金刚石膜(DLC)的研究进展。
The advantages and limitations of pulsed-deposition (DLC) diamond-like carbon films (DLCs) are reviewed. The limitations and breakthroughs of PLD-based diamond films and the important development directions of the pulse deposition methods are reviewed. Ultra-fast PLD diamond- (DLC) research progress.