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采用化学溶液法结合层层旋涂退火工艺,在掺氟氧化锡导电玻璃基片上制备了BiFe0.95Mn0.05O3和Bi0.9Nd0.1FeO3纳米晶铁电薄膜,并分析比较了其微结构和铁电性能.结果表明:2组分样品均为单相多晶钙钛矿结构,晶粒细小均匀,表面平整,结构致密.两薄膜均获得了饱和电滞回线,且BiFe0.95Mn0.05O3薄膜具有向上的择优取向极化和更优异的铁电性能,其剩余极化强度(Pr)达60 μC·cm-2,在1～50kHz频率范围与25～200℃温度区间内铁电极化响应稳定,保持时间长达1×103s工作与反复极化翻转高达1×109次表现出优异的电荷保持力和抗疲劳稳定性.“,”The nano-crystalline ferroelectric films composed of BiFe0.95Mn0.05O3 and Bi0.9Nd0.1FeO3 were fabricated on the fluorine-doped tin oxide/glass substrates via the simple and cost-effective chemical solution deposition method combined with spin-coating and the subsequent layer-by-layer annealing technique.Microstructures and ferroelectric properties of the samples were investigated.Results show that either BiFe0.95Mn0.05O3 or Bi0.9Nd0.1FeO3 film has a single polycrystalline perovskite phase structure with fine and homogeneous grains and smooth surface in addition to a compact and dense structure.Both film samples exhibited well-saturated polarization-electric field hysteresis loops.Especially,the BiFe0.95Mn0.05O3 film showed more preferential upward polarization orientation and superior ferroelectric properties than the Bi0.9Nd0.1FeO3 film,which was reflected by a high remanent polarization(Pr)of 60 μC·cm-2 and stable ferroelectric responses to frequency and temperature in the ranges of 1 to 50 kHz and 25 to 200℃in addition to retention capability of 1×103 seconds and fatigue endurance over 1×109 cycles.