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用反应射频溅射法在导电玻璃上制备TiO2薄膜,并用Ar射频等离子体对TiO2薄膜进行处理。利用XRD、XPS、UVVIS透射光谱和AFM等测试手段研究Ar射频等离子体处理对TiO2纳米薄膜的结构、成分和光电性能的影响,用液滴形貌分析法测量水滴在TiO2薄膜表面的接触角。经过Ar射频等离子处理后,用TiO2薄膜组装的光电池的光电流提高了约80%,TiO2薄膜的亲水角由66°左右迅速减小。
The TiO2 film was prepared on the conductive glass by reactive RF sputtering and the TiO2 film was treated with Ar radio frequency plasma. XRD, XPS, UVVIS transmission spectroscopy and AFM were used to study the influence of Ar radio frequency plasma treatment on the structure, composition and optical properties of TiO2 nanofilms. The droplet morphology was used to measure the contact angle of water droplets on the surface of TiO2 film. After Ar radio frequency plasma treatment, the photocurrent of photocell assembled with TiO2 film increased about 80%, and the hydrophilic angle of TiO2 film decreased rapidly from 66 °.