Humidity sensing properties of spray deposited Fe doped TiO2 thin film

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In the present work,ferrite (Fe) doped TiO2 thin films with different volume percentage (vol%) were synthesized us-ing a spray pyrolysis technique.The effect of Fe doping on structural properties such as crystallite size,texture coefficient,mi-crostrain,dislocation densities etc.were evaluated from the X ray diffratometry (XRD) data.XRD data revealed a polycrystalline anatase TiO2 phase for sample synthesized up to 2 vol% and mixed anatase and rutile crystalline phase for sample synthesized at 4 vol% Fe doped TiO2.The crystalline size was observed to decrease with increase in Fe dopant vol% and also other structur-al parameters changes with Fe dopant percentage.In the present work,electrical resistance was observed to decrease with a rise in Fe dopant vol% and temperature of the sample.Thermal properties like temperature coefficient of resistance and activa-tion energy also showed strong correlation with Fe dopant vol%.Humidity sensing properties of the synthesized sample altered with a change in Fe dopant vol%.In the present paper,maximum sensitivity of about 88.7% for the sample synthes-ized with 2 vol% Fe doped TiO2 and also the lowest response and recovery time of about 52 and 3 s were reported for the same sample.
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