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Investigations of electrical asymmetry effect on plasma properties in capacitively coupled oxygen di
[会议论文] 作者：Quan-Zhi Zhang,E Schüngel,S. Iwashita,J. Schulze,L.-J. Hou,U. Czarnetzki,
来源：2011年第三届微电子及等离子体技术国际会议 年份：2011
By using a combined experimental,numerical and analytical approach,we investigate Electrical asymmetry effect (EAE),which could achieve high-degree separate control of ion flux and energy in dual-freq...
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