Investigations of electrical asymmetry effect on plasma properties in capacitively coupled oxygen di

来源 :2011年第三届微电子及等离子体技术国际会议 | 被引量 : 0次 | 上传用户：tedloo

【摘要】

：

【作者】

：

Quan-Zhi Zhang E Schüngel S. Iwashita J. Schulze L.-J. Hou U. Czarnetzki

【机构】

：

School of Physics and Optoelectronic Technology, Dalian University of Technology, China

【出处】

：

2011年第三届微电子及等离子体技术国际会议

【发表日期】

：

2011年9期

【关键词】

：

Plasma PIC Electronegative Electrical asymmetry effect (EAE) Plasma series reson

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By using a combined experimental,numerical and analytical approach,we investigate Electrical asymmetry effect (EAE),which could achieve high-degree separate control of ion flux and energy in dual-frequency capacitively coupled radio-frequency (CCRF) discharges,on plasma properties in geometrically symmetric discharges with the working gas is oxygen.

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Investigations of electrical asymmetry effect on plasma properties in capacitively coupled oxygen di

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