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[会议论文] 作者:Chieh-Wen Lo,Satoshi Hamaguchi, 来源:2011年第三届微电子及等离子体技术国际会议 年份:2011
Dynamic processes of capacitively-coupled hydrogen plasmas generated by fast-rising pulsed high voltages at near-atmospheric pressure have been studied with the use of Particle-in-Cell (PIC) simulatio...
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