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Study on plasma uniformity by using 2D real time measurement method in Ar/He inductively coupled pla
[会议论文] 作者：Young-Cheol Kim,Hyo-Chang Lee,Chin-Wook Chung,
来源：2011年第三届微电子及等离子体技术国际会议 年份：2011
Recently,measurement method of two dimensional (2D) spatial distribution of plasma parameters based on the floating harmonic method was developed by Chung and co-workers [1,2]....
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