硅底层相关硕士博士期刊学术论文 - 搜论网

硅底层相关论文

Heteroepitaxial Growth and Characterization of 3C-SiC Films on Si Substrates Using LPVCVD

3C-SiC films have been deposited on Si (111) substrates by the Iow-pressure vertical chemical vapor deposition (LPVCVD) ......

期刊

3C-SiC薄膜低压化学水气沉积硅底层气体混合剂 3C-SiC films Low-pressure vertical chemical vapor d

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