为研究月基极紫外相机Mo/Si多层膜反射镜能否在月面辐照环境下长期稳定工作,从理论仿真、光学性能、微观形貌三方面对其辐照稳定性......

A series of Mo/Si multilayers with the same periodic length and different periodic number were prepared by magnetron spu......

研制了用于超快激光等离子体诊断的Schwarzschild型正入射显微镜，该显微镜工作波长为182 nm，数值孔径为0.1，放大倍数为10。根据诊断......

Mo/Si多层膜镀膜工艺是极紫外光刻的关键技术之一,为了优化并提升Mo/Si多层膜的镀膜工艺,研究了气压、靶-基底间距这两个工艺参数......