用TEA(Transversely-excited Atmosphere-pressure)CO激光辐射SiH-Ar-CH，SiH-Ar-CH，SiH-Ar-CH，SiH-Ar-CH等源反应气体，产生等离子体合......

用TEA（Transversely-excitedAtrnosphere-pressure）CO2激光辐照SiH4-Ar-CH4，SiH4-Ar-C2H4，SiH4-Ar-C2H6，SiH4-Ar-C3H6等源反应气体，产生......