磁控管溅射相关论文
脉冲等离子在溅射方面的应用在过去的几年里日渐盛行.最近,一种新的脉冲等离子技术已被引入到溅射领域.高能脉冲磁控管溅射(HPPMS)......
Silicon carbonitride (SiCN) coatings were deposited on silicon and tungsten carbide substrates by co-sputtering silicon ......
应用Co的溅射原理,以磁控管溅射低温沉积法在轴承钢Gr15(20mm×5mm)基体上分别制备了B4C-Mo和TiC-W金属陶瓷涂层.然后测量了......
