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Templated i-PVD of dielectric nanodot arraysusing pulsed bias to enhance process
【机 构】
:
DepartmentofPhysics,ShanghaiJiaoTongUniversity,200030,Shanghai,P.R.ChinaCSIROMaterialsScienceandEngi
【出 处】
:
9th Asia-Pacific Conference on Plasma Science and Technology
【发表日期】
:
2008年10期
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