Measurement of metastable N2(A3Πu +) density in inductively-coupled nitrogen plasma by cavity ringdo

来源 :2011年第三届微电子及等离子体技术国际会议 | 被引量 : 0次 | 上传用户:weiwei00414
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We developed a system of cavity ringdown absorption spectroscopy to apply it to the measurement of N2(A3Πu+) density in an inductively-coupled nitrogen plasma source.
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