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Silicon based MOS light emitting devices fully processed by atomic layer deposition technology
【机 构】
:
Division of Silicon Photonic and Energy Storage Devices,School of Physics,Nankai University,Weijin R
【出 处】
:
第一届国际ALD应用大会暨第二届中国ALD学术交流会
【发表日期】
:
2012年4期
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