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Industrial ion implantation with Intevac ENERGiTM ion implant tool provides a major processing advantage and cost reduction.Currently, Intevacs ENERGi ion implant system has processed millions of wafers in production with better cost of ownership (COO) than POCl3 diffusion process.ENERGi ion implant has successfully demonstrated a production cell of 19.95% with 646mV Voc with a standard screen printed processing.ENERGi is now capable of boron implantation which enables high efficiency bifacial industrial production.