【摘 要】
：
A brief introduction to INO elpertise and business model will be presented. The main body of this presentation will illustrate INO unique contribution to de
【机 构】
：
ResearcherofINO(InstituteNationald`Optique)Canada
【出 处】
：
2011传感器与MEMS技术产业化国际研讨会
论文部分内容阅读
A brief introduction to INO elpertise and business model will be presented. The main body of this presentation will illustrate INO unique contribution to design, manufacturing, and testing of Various MEMS devices used for optical display and optical beam scanning and modulation as well as detection of IR radiation.In particular, Various types of micro mirrors and micro mirromirror arrays will be presented including small-angle controlled tilt devices, the so called giant micro mirrors 3 mm in diameter for two-axis 60 degrees high-power laser beam scanning, and piston mirror arrays. A linear array of 2000 deformable micro mirrors for high一definition projection imaging will also be described. The technology of electrostatically-activated micro shutters will also be discussed.
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